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以BCl3和NH3为原料气体,制备了化学气相沉积(CVD)BN。在所建立的沉积系统中,研究了温度、系统压力和原料气体的流量等对CVD BN沉积过程的影响,指出了较佳的沉积条件。通过对CVD BN试样的X射线衍射分析和显微镜观察,表明所制备的CVD BN是各向同性的,其显微结构由纤维状晶体所形成的放线状“球晶”所构成,而其晶体结构具有层状无序的结晶学特征。
Abstract：CVD BN ceramics has been prepared by using BCl3 and NH3 as gaseous raw materials.The effects of temperature, pressure and the ratio of the reactant gases are investigatedwith the CVD apparatus made at the institute.The optimum deposition conditions for theCVD BN are discussed. The X-ray diffraction and the microscopic observation of the CVD BN samples showthat the polycrystalline CVD BN produced is isotropic and is composed of radial "Ball cry-stals" formed from fibrous crystallites.The crystal structure of CVD BN has the characteri-stics of disordered layer.
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引用信息:
[1]温廷琏,李文兰,李世椿.化学气相沉积制备的氮化硼[J].硅酸盐学报,1980(04):351-356+446.
1980-08-28
1980-08-28