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对近年来有关溶胶 -凝胶法制备LiNbO3薄膜的研究进行了较详细的综述 ,分析讨论了在溶胶 -凝胶法制备LiNbO3薄膜过程中 ,各主要因素对LiNbO3薄膜制备的影响 ,简要地介绍了LiNbO3薄膜的一些性能 .研究结果表明 ,目前可以用溶胶 -凝胶法在蓝宝石及LiTaO3等基板 (基板的晶格参数与LiNbO3的晶格参数失配较小 )上制备出有光学应用的LiNbO3薄膜 ,制膜的热处理温度通常在 5 0 0℃左右 .讨论了溶胶 -凝胶法制备LiNbO3薄膜过程中存在的主要问题、发展前景及今后的研究方向
Abstract：The recent researches on LiNbO 3 thin films prepared by sol-gel processes is described in this paper. The main influences of factors, including Li and Nb-raw materials, solvents, stablizers, substrates, viscosity of solutions, methods and technology of coating films, dry and heat treatment of the films, on the formation and properties of LiNbO 3 films are briefly described. It is shown that highquality LiNbO 3 thin films for optical applications can be prepared on substrates (such as sapphire and LiTaO 3 in which there is small lattice mismatch between substrate) by sol-gel method. The temperature of heat treatment for the films is usually about 500 ℃. The main existing problems in preparing LiNbO 3 thin films, the research directions and development prospects are also discussed.
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DOI：
中图分类号:TN304.055
引用信息:
[1]张一兵,翁文剑,杜丕一,沈鸽,韩高荣,叶志镇.溶胶-凝胶法制备LiNbO_3薄膜的研究[J].硅酸盐学报,2002(02):230-234.
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